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Correlation between charge injection and memory window in the ferroelectric gate stack structures

Authors

Sung-Kyun Lee; 최인훈; 이철의; Kim Yong Tae; KIM CHUN KEUN

Citation

2001 Korea-japan Joint Workshop on Advanced Semiconductor Process and Equipment, pp.13 - 15

Keywords

ferroelectric gate structure

URI

https://pubs.kist.re.kr/handle/201004/107573

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KIST Conference Paper > Others

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