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Ion beam enhanced formation and luminescence of Si Nanoclusters from α -Sio// χ

Authors

Yohan Sun; Se-Young Seo; Jung Hoon Shin; Tae Gon Kim; Cheong Nam Whang; SONG JONG HAN

Citation

Mat. Res. Soc. Symp. Proc., v.647

Keywords

PE-CVD

URI

https://pubs.kist.re.kr/handle/201004/107606

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KIST Conference Paper > Others

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