KIST Library Institutional Repository

An experimental study on the micro-adhesion of octadecyltrichlorosilane SAM on si surface

Authors

Yoon Eui Sung; 박지현; YANG SEUNG HO; HAN HUNG GU; Kong Hosung

Citation

1st Intelligent Microsystem Symposium IMS 2001, pp.158 - 162.

Keywords

micro/nano tribology; adhesion; octadecyltrichlorosilane; SAM; self-assembled monolayer

URI

https://pubs.kist.re.kr/handle/201004/107789

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML