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A fabrication and characterizations of high quality VOx thin films through post annealing of VOx/V/VOx multi-layer for uncooled IR detectors

Other Titles

VOx/V/VOx 다층구조의 후열처리를 통한 비냉각형 적외선 감지소자용 고성능 VOx 박막의 제조 및 특성분석

Authors

한용희; Moon Sung Wook; 최인훈

Citation

적외선 영상센서 conference 확대 초록집, pp.89 - 95

Keywords

VOx; IR detector; TCR

URI

https://pubs.kist.re.kr/handle/201004/107894

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KIST Conference Paper > Others

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