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3D MEMS antenna fabrication for enhanced uncooled infrared detector

Other Titles

비냉각 적외선 감지소자 성능향상을 위한 3차원 MEMS 안테나의 제조

Authors

JONG-YEON PARK; Moon Sung Wook; PARK JEONG HO

Citation

적외선 영상센서 conference 확대 초록집, pp.26 - 30

Keywords

MRPBI

URI

https://pubs.kist.re.kr/handle/201004/107906

Appears in Collections:

KIST Conference Paper > Others

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