Electromigration-induced stress interaction between via and polygranular cluster

Authors
PARK YOUNG JOON최인석주영창
Citation
Mat. Res. Soc. Symp. Proc., v.612, pp.D8.11.1 - D8.11.6
Keywords
electromigration; stress; simulation
URI
https://pubs.kist.re.kr/handle/201004/108156
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KIST Conference Paper > Others
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