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Impurity free vacancy disordering of an InGaAsP quantum-well structure by using SiN//x film prepared by plasma enhanced chemical vapor deposition

Authors

Choi Won Jun; 이희택; Woo Deok Ha; Kim Sun Ho

Citation

Proceedings of ICSMM2000, pp.63

Keywords

quantum well intermixing

URI

https://pubs.kist.re.kr/handle/201004/108186

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KIST Conference Paper > Others

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