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Design and fabrication of a micromechanical inverter

Authors

채경수; 한승오; 송민석; Moon Sung Wook; PARK JEONG HO

Citation

Proceedings of SPIE-Micromachining and Microfabrication Process Technology VI, v.4174, pp.508 - 514

Keywords

mechanical inverter; MEMS; micromechanical switch; electrostatic actuator; surface micromachining

URI

https://pubs.kist.re.kr/handle/201004/108195

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KIST Conference Paper > Others

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