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dc.contributor.author채경수-
dc.contributor.author한승오-
dc.contributor.author송민석-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorPARK JEONG HO-
dc.date.accessioned2024-01-13T15:03:06Z-
dc.date.available2024-01-13T15:03:06Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108195-
dc.languageEnglish-
dc.subjectmechanical inverter-
dc.subjectMEMS-
dc.subjectmicromechanical switch-
dc.subjectelectrostatic actuator-
dc.subjectsurface micromachining-
dc.titleDesign and fabrication of a micromechanical inverter-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProceedings of SPIE-Micromachining and Microfabrication Process Technology VI, v.4174, pp.508 - 514-
dc.citation.titleProceedings of SPIE-Micromachining and Microfabrication Process Technology VI-
dc.citation.volume4174-
dc.citation.startPage508-
dc.citation.endPage514-
dc.citation.conferencePlaceUS-
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