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A study on the characteristics of multi-VOx thin films for uncooled IR detector

Other Titles

비냉각 적외선 감지소자를 위한 다층 산화 바나듐 박막의 특성에 관한 연구

Authors

Park Chul Woo; Moon Sung Wook; 정홍배

Citation

제3회 국방소재학술대회, pp.B-15 - B-20

Keywords

microbolometer; RF spittering; VOx

URI

https://pubs.kist.re.kr/handle/201004/108203

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KIST Conference Paper > Others

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