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HF CVD 방법을 이용한 nanocrystalline 다이아몬드 박막합성

Authors

강민식; Baik Young Joon; Lee Wook Seong; 임대순

Issue Date

2000-07

Citation

한국진공학회 제 19 회 학술발표회 2000 년 7. 13-14, pp.?

Keywords

nanocrystalline diamond film

URI

https://pubs.kist.re.kr/handle/201004/108293

Appears in Collections:

KIST Conference Paper > Others

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