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전계 방출 현상을 이용한 마이크로 터널링 센서의 제작

Authors

Ju Byeong Kwon; 박흥우; 이덕중; 서상원; 김남수; PARK JEONG HO; OH MYUNG HWAN

Issue Date

2000-07

Citation

Field Emission Workshop '00, pp.?

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/108326

Appears in Collections:

KIST Conference Paper > Others

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