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Vacuum packaging and operating properties of micro-tunneling sensors

Authors

Ju Byeong Kwon; 박흥우; 이덕중; SON YONG BAE; PARK JEONG HO; OH MYUNG HWAN

Citation

5th ISMP, pp.110

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/108461

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KIST Conference Paper > Others

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