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Effect of substrate temperature on etched feature of thin chromium film and its application

Authors

SEO SANG WON; KIM HOON; 박종원; LEE YUN HI; 박공석; Jung Jae Hoon; 장진; 김동호; OH MYUNG HWAN; 김남수; Ju Byeong Kwon; KIM HOON

Citation

ISPSA 2000, pp.197

Keywords

etched feature; thin chromium film; substrate temperature

URI

https://pubs.kist.re.kr/handle/201004/108717

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KIST Conference Paper > Others

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