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Asymmetric pulsed dc sputtered AIN thin film for FBAR application

Authors

김주형; 이시형; Lee Jeon Kook; AHN JIN HO

Citation

강유전체 및 FRAM 기술 Workshop, pp.160 - 164

Keywords

asymmetric pulsed dc

URI

https://pubs.kist.re.kr/handle/201004/108733

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KIST Conference Paper > Others

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