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Free-standing diamond wafers deposited by single-and multi-cathode direct-current plasma assisted CVD

Authors

EUN, KWANG YONG; LEE JAE KAP; Lee Wook Seong; Baik Young Joon

Citation

Proceedings of ADC/FCT '99 : 5th International Conference on the Applications of Diamond Films and R, pp.175 - 178

Keywords

CVD; DC plasma; dialmond film; large area deposition

URI

https://pubs.kist.re.kr/handle/201004/108984

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KIST Conference Paper > Others

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