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FED 기술 및 KIST 연구결과의 소개

Authors

Ju Byeong Kwon

Issue Date

1999-08

Citation

한국진공학회 플라즈마분과 심포지움, pp.12

Keywords

FEA; FED; MEMS

URI

https://pubs.kist.re.kr/handle/201004/109057

Appears in Collections:

KIST Conference Paper > Others

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