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Thermal conductivity of diamond-wafer deposited with multi-cathode DC-PACVD

Authors

홍진수; 채희백; LEE JAE KAP; Baik Young Joon

Citation

Korea-Japan Thermophysical Properties Symposium, pp.15 - 20

Keywords

CVD; DC plasma; diamond film; thermal conductivity

URI

https://pubs.kist.re.kr/handle/201004/109088

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KIST Conference Paper > Others

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