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Micro-tunneling sensors for vacuum level evaluation of field emission display devices

Authors

박흥우; Ju Byeong Kwon; 박윤권; 김철주; OH MYUNG HWAN

Citation

IVMC '99, pp.340 - 341

Keywords

FED; FEA; MEMS

URI

https://pubs.kist.re.kr/handle/201004/109100

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KIST Conference Paper > Others

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