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A study for fabrication of microbolometer using by vanadium oxide thin films

Other Titles

산화 바나듐 박막을 이용한 마이크로 볼로미터 제조에 관한 연구

Authors

김민철; 박근우; KANG HO KWAN; 심태석; Moon Sung Wook; 김도훈; OH MYUNG HWAN

Citation

1999 제 1 회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS conference, pp.241 - 247

Keywords

microbolometer; vanadium oxide; TCR

URI

https://pubs.kist.re.kr/handle/201004/109148

Appears in Collections:

KIST Conference Paper > Others

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