Improvement of field emission properties by Nb-silicide formation on Si-tip FEAs

Authors
박재석이상조Ju Byeong KwonOH MYUNG HWAN장진
Citation
제6회 반도체 학술대회, pp.585 - 586
Keywords
FEA; FED; MEMS
URI
https://pubs.kist.re.kr/handle/201004/109424
Appears in Collections:
KIST Conference Paper > Others
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