DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorKANG, HO KWAN-
dc.contributor.authorKIM MIN CHEOL-
dc.contributor.author하원호-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author김도훈-
dc.date.accessioned2024-01-13T17:32:11Z-
dc.date.available2024-01-13T17:32:11Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109493-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectmicrobolometer-
dc.subjectsurface micromachining-
dc.subjectSiNx-
dc.subjectVOx-
dc.titleFabrication of microbolometer using MEMS technology-
dc.title.alternativeMEMS 기술을 이용한 마이크로 볼로미터의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation적외선 영상센서 Conference, v.10, pp.70 - 75-
dc.citation.title적외선 영상센서 Conference-
dc.citation.volume10-
dc.citation.startPage70-
dc.citation.endPage75-
dc.citation.conferencePlaceKO-
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