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Other Titles

정전 접합법을 이용한 진공 미세 소자용 spacer 형성 기술 개발

Authors

강문식; Ju Byeong Kwon; 장윤택; 이덕중; LEE YUN HI; 이내성; KIM JONG MIN; 유건호; OH MYUNG HWAN

Citation

한국센서학회 종합학술대회

Keywords

FEA; FED; MEMS

URI

https://pubs.kist.re.kr/handle/201004/109539

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KIST Conference Paper > Others

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