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A comparative study for the characteristics of VOx thin films fabricated by thermal oxidation and sputtering methods

Other Titles

열산화법 및 sputtering법으로 제조된 산화 바나듐 박막의 특성 비교

Authors

PARK CHUL WOO; KIM MIN CHEOL; KANG HO KWAN; Moon Sung Wook; OH MYUNG HWAN; 정홍배

Citation

센서학회지, v.10, no.1, pp.363 - 367

Keywords

열산화법; sputtering법; 산화 바나듐; 박막; 특성비교; sputtering; oxidation; TCR

URI

https://pubs.kist.re.kr/handle/201004/109547

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KIST Conference Paper > Others

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