KIST Library Institutional Repository

Fabrication of un-cooled infrared sensor using pyroelectric thin film

Authors

박윤권; Ju Byeong Kwon; 박흥우; Yoon Young Soo; Sang-Seop Yom; Oh Young-Jei; PARK JEONG HO; SUH SANG HEE; OH MYUNG HWAN; 김철주

Citation

Conference on Device and Process Technologies for MEMS and Microelectronics, v.3892 (SPIE), pp.356 - 363

Keywords

thermally isolating membrane; uncooled IR-sensor; direct bonding; pyroelectirc thin film; square-shaped structure silicon substrate; sacribicial layer

URI

https://pubs.kist.re.kr/handle/201004/109671

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML