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Stable operation of large cathode using an oscillating source magnet current in filtered vacuum arc process.

Authors

김종국; 정기형; 전영하; Lee Kwang Ryeol

Citation

Proc. Applied Diamond Conference 99, pp.256 - 261

Keywords

filtered cathodic arc; diamond-like carbon; magnetic field

URI

https://pubs.kist.re.kr/handle/201004/109805

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KIST Conference Paper > Others

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