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Measurement of elastic properties of diamond-like carbon films using a simple micro-fabrication

Authors

CHO SUNG JIN; 정진원; Lee Kwang Ryeol; EUN KWANG YONG; 한준희; KIM YOUNG MAN

Citation

Proc. Applied Diamond Conference 99, pp.602 - 608

Keywords

thin films; elastic properties; micro-fabrication

URI

https://pubs.kist.re.kr/handle/201004/109823

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KIST Conference Paper > Others

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