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Micromachining and fabrication of thin films for MEMS-infrared detectors

Authors

Sang-Seop Yom; 박흥우; 박윤권; Ju Byeong Kwon; CHOI HYUN SEOK; Oh Young-Jei; LEE JONG HOON; CHUNG MOONKYO; SUH SANG HEE; OH MYUNG HWAN

Citation

3rd Int'l Meeting of Pacific Rim Ceramic Societies, pp.?

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/109931

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KIST Conference Paper > Others

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