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The effect of grain structure on the current-density exponent in the black equation for Al-based interconnects

Authors

HAN JUN HYUN; SHIN MYUNG CHUL; S.H. Kang

Citation

The 4th International conference on Electronic Materials, 제주 , 한국 , 8 월 24 ∼ 27 일 (1998), pp.68

Keywords

electromigration; Current Density Exponent; Black Equation

URI

https://pubs.kist.re.kr/handle/201004/109970

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KIST Conference Paper > Others

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