Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김동준 | - |
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | 박종완 | - |
| dc.date.accessioned | 2024-01-13T18:34:34Z | - |
| dc.date.available | 2024-01-13T18:34:34Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/110181 | - |
| dc.language | English | - |
| dc.subject | Amorphous | - |
| dc.title | Effects of boron on diffusion barrier characteristics of PECVD W-B-N films | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | MRS 98', pp.? | - |
| dc.citation.title | MRS 98' | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | US | - |
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