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Alicyclic polymers based on t-BOC-dinorbonene as resists materials

Authors

이재형; KANG JONG HEE; KIM JONG MAN; 이찬우; Han Dong Keun; Ahn Kwang-Duk; CHO I WHAN; 구재선; 오승훈; 이상균; 문성윤; 강신이

Citation

한국고분자학회 , 서울 서강대 , 1998. 4. 10-11., pp.24

URI

https://pubs.kist.re.kr/handle/201004/110195

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KIST Conference Paper > Others

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