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유기금속 화합물을 이용한 AlN의 제조

Authors

CHO SEONG HOON; Ahn Hongsang; 신경섭; 경제홍; 최승철; HAN SUNG HAN

Issue Date

1998-04

Citation

대한화학회발표 (춘계), pp.166

Keywords

CVD; AIN

URI

https://pubs.kist.re.kr/handle/201004/110209

Appears in Collections:

KIST Conference Paper > Others

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