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Resistless nanometer patterning of SiO₂ with electron beam irradiation

Authors

KIM SEOK IL; 정석구; 최범호; 현찬경; KIM EUN KYU; Min Suk-Ki; 황성우

Citation

제 5 회 한국반도체학술대회, pp.585 - 586

Keywords

Resitless nanometer patterning of SiO ₂ with electron beam irradiation

URI

https://pubs.kist.re.kr/handle/201004/110247

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KIST Conference Paper > Others

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