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A basic study for the microbolometer using VOx thin films

Other Titles

Vanadium 산화물을 이용한 microbolometer 기초연구

Authors

Moon Sung Wook; 김민철; KANG HO KWAN; Yoon Young Soo; SUH SANG HEE; 김도훈; OH MYUNG HWAN

Citation

제 9 회 적외선 영상 센서 Conference

Keywords

MEMS; 비냉각적외선센서; Vanadium Oxide

URI

https://pubs.kist.re.kr/handle/201004/110291

Appears in Collections:

KIST Conference Paper > Others

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