MEMS-IR sensor fabrication and characterization

Other Titles
MEMS-IR Sensor 의 제조 및 특성 평가
Authors
Ju Byeong Kwon박흥우박윤권PARK JEONG HO김철주Sang-Seop YomSUH SANG HEEOH MYUNG HWAN
Citation
제 9 회 적외선 영상 센서 Conference, pp.?
Keywords
MEMS
URI
https://pubs.kist.re.kr/handle/201004/110306
Appears in Collections:
KIST Conference Paper > Others
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