A study for the facet evolution of CCl4-doped Al0.5Ga0.5As/GaAs multilayers grown on patterned GaAs substrates by metalorganic chemical vapor deposition

Title
A study for the facet evolution of CCl4-doped Al0.5Ga0.5As/GaAs multilayers grown on patterned GaAs substrates by metalorganic chemical vapor deposition
Authors
김효진손창식박영균김은규김태환
Keywords
facet evolution; AlGaAs; GaAs; metalorganic chemical vapor deposition
Issue Date
1998-10
Publisher
한국물리학회 회보; Bulletin of the Korean Physical Society
Citation
VOL 16, NO 2, 474-474
URI
https://pubs.kist.re.kr/handle/201004/11062
Appears in Collections:
KIST Publication > Conference Paper
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