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PECVD 방법에 의해 제작된 SiNx/InP MIS 구조의 bias stress 에 의한 C-V 및 G-V 곡선의 변화 .

Title
PECVD 방법에 의해 제작된 SiNx/InP MIS 구조의 bias stress 에 의한 C-V 및 G-V 곡선의 변화 .
Authors
강광남; 이정일; 이명복; 한일기; 이유종
Keywords
MIS 구조
Issue Date
1992-01
Publisher
새물리
Citation
v. 32, no. 2, 252-?
URI
https://pubs.kist.re.kr/handle/201004/11085
Appears in Collections:
KIST Publication > Article
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