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Formation of silicon nano-crystallites by electron cyclotron resonance chemical vapor deposition and ion beam assisted electron beam deposition

Authors

KIM EUN KYU; Min Suk-Ki; CHOI WON CHEOL; PARK JONG YEUN

Citation

MRS 1997 fall meeting, pp.203

Keywords

Si nano-crystallites

URI

https://pubs.kist.re.kr/handle/201004/110954

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KIST Conference Paper > Others

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