Enhancement of adhesion between Cu thin film and polyimide modified by ion assisted reaction

Authors
KOH SEOK KEUNK. H. KimS. C. ChoiC. N. Whang정형진
Citation
Mat. res. soc. symp., pp.?
URI
https://pubs.kist.re.kr/handle/201004/110956
Appears in Collections:
KIST Conference Paper > Others
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