The control of stoichiometry and crystallinity of SnOx thin films applied for chemical sensor element

Authors
CHOI WON-KOOK조정KOH SEOK KEUNJ. S. ChoY. S. Yoon정형진
Citation
Proceedings of the 3rd East Asian conference on chemical sensors., pp.558 - ?
Keywords
reactive ion-assisted deposition
URI
https://pubs.kist.re.kr/handle/201004/111173
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KIST Conference Paper > Others
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