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The investigations of dielectric and structural properties of polycrystalline BaTiO//3 thin films on Pt substrates by rf magnetron sputtering

Title: The investigations of dielectric and structural properties of polycrystalline BaTiO//3 thin films on Pt substrates by rf magnetron sputtering

Authors: 장진욱; 조운조; 한택상; 최상삼; 정수진

Keywords: BaTiO//3 thin film; rf magnetron sputtering; Pt substrate; polycrystalline thin film

Issue Date: 1998-01

Publisher: Ferroelectrics

Citation: VOL 205, NO 1, 37-48

URI: https://pubs.kist.re.kr/handle/201004/11119

ISSN: 0015-0193

Appears in Collections:: KIST Publication > Article

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