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Preparation of boron nitride thin films by MOCVD

Other Titles

유기금속화학증착법에 의한 Boron nitride 의 제조

Authors

Park Dal keun; 진용기; 주재백; Lee Joong Kee

Citation

화학공학의 이론과 응용, v.3, no.2, pp.3225 - 3228

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/111304

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KIST Conference Paper > Others

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