Evaluation of mechanical properties of DLC thin films

Other Titles
DLC 박막의 기계적 성질 평가
Authors
Lee Kwang Ryeol박해석정중현이상로안정훈권동일
Citation
제 9 회 재료물성 심포지움 , 대한금속학회, pp.39 - 51
Keywords
mechanical properties
URI
https://pubs.kist.re.kr/handle/201004/111408
Appears in Collections:
KIST Conference Paper > Others
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