Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최우범 | - |
| dc.contributor.author | Ju Byeong Kwon | - |
| dc.contributor.author | LEE YUN HI | - |
| dc.contributor.author | S. J. Jeong | - |
| dc.contributor.author | M. R. Haskard | - |
| dc.contributor.author | LEE NAM YANG | - |
| dc.contributor.author | 성만영 | - |
| dc.contributor.author | OH MYUNG HWAN | - |
| dc.date.accessioned | 2024-01-13T21:03:57Z | - |
| dc.date.available | 2024-01-13T21:03:57Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/111454 | - |
| dc.language | English | - |
| dc.subject | MEMS | - |
| dc.title | Experimental analysis of the process of anodic bonding with an evaporated glass layer | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | MRS 1996 fall meeting, Boston, USA., pp.? | - |
| dc.citation.title | MRS 1996 fall meeting, Boston, USA. | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | US | - |
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