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A study on hermetic glass sealing using a modified direct bonding method

Authors

Ju Byeong Kwon; LEE YUN HI; OH MYUNG HWAN; C. G. Ko; I. B. Kang; P. White; N. Samaan; M. R. Haskard

Citation

MRS 1996 fall meeting, Boston, USA., pp.?

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/111456

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KIST Conference Paper > Others

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