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Enhanced of lateral growth rate during MOCVD growth on patterned GaAs substrates with CBr//4.

Authors

SON CHANG-SIK; 황성민; Kim Seong Il; 황성민; KIM MOO SUNG; Min Suk-Ki; KIM EUN KYU; KIM YOUN

Citation

Proceedings of the microprocess '96, pp.166 - 169

Keywords

lateral growth

URI

https://pubs.kist.re.kr/handle/201004/111669

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KIST Conference Paper > Others

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