Effect of crystallographic orientation on carbon incorporation into GaAs and AlGaAs epilayers grown by metalorganic chemical vapor deposition.

Authors
SON CHANG-SIKKim Seong IlMin Suk-KiKIM EUN KYUKIM YOUN최인훈
Citation
Proceedings of the ISPSA '96, pp.40 - ?
Keywords
carbon
URI
https://pubs.kist.re.kr/handle/201004/111678
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KIST Conference Paper > Others
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