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Fabrication of knife type Si tip array by orientatio dependent etching of single silicon substrate

Other Titles

단결정 Si 기판의 결정 의존성 식각에 의한 Knife형 Si tip array의 제조

Authors

정유호; 고창기; 김철주; Ju Byeong Kwon; OH MYUNG HWAN

Citation

'95 대한전기학회 하계학술대회논문집, pp.1428 - 1430

URI

https://pubs.kist.re.kr/handle/201004/111804

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KIST Conference Paper > Others

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