이온 빔 보조 식각 방법을 이용한 GaAs/AlGaAs 저손실 광도파로의 제작 .

Authors
KPARK KYUNG HYUNByun Young TaeKim Young HwanKim Sun HoCHOI SANG SAM조욱래박승한김웅
Citation
Photonics Coference '95, pp.253 - 254
Keywords
이온 빔 보조 식각 방법(IBAE); ECR 이온 식각법; MBE 성장 기법; 저손실 광도파로
URI
https://pubs.kist.re.kr/handle/201004/111871
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KIST Conference Paper > Others
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