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keV surface modification and thin film growth

Authors

KOH SEOK KEUN; CHOI WON-KOOK; Yoon Young Soo; Seok-Kyun Song; CHO JUN SIK; KIM KI HWAN; 정형진

Citation

Proc. of the 2nd Korea-China symposium on ion beam modification of materials and thin film materials, pp.95 - 101

URI

https://pubs.kist.re.kr/handle/201004/112016

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